Swagelok Ultrahigh-Purity Gas Filters - Inline, SCF Series
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Swagelok Ultrahigh-Purity Gas Filters - Inline
Product Shipping Subject to Factory Availability Need Specifications? See PDF Section Below.
Swagelok Ultrahigh-Purity Gas Filters - Inline, SCF Series is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applications.
Features:
High particle removal efficiency
Exceptionally low particle shedding
Superior moisture dry-down characteristics
Extremely low outgassing
Outstanding chemical compatibility
High differential pressure rating
Inline, all-welded construction
End Connection Sizes:
1/4, 1/2, and 3/4" integral male VCR face seal fittings
1/4" female VCR face Seal Fittings
Maximum Flow Rates:
30, 225, 600, 900, and 2700 std L/m
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Swagelok Ultrahigh-Purity Gas Filters - Inline
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